Compact Plasma and Focused Ion Beams by Sudeep Bhattacharjee

By Sudeep Bhattacharjee

Recent examine has introduced the applying of microwaves from the classical fields of heating, communique, and new release of plasma discharges into the new release of compact plasmas that may be used for functions resembling FIB and small plasma thrusters. notwithstanding, those new functions deliver with them a brand new set of demanding situations. With assurance starting from the fundamentals to new and rising functions, Compact Plasma and concentrated Ion Beams discusses how compact high-density microwave plasmas with dimensions smaller than the geometrical cutoff measurement will be generated and applied for offering concentrated ion beams of assorted parts.

Starting with the basics of the cutoff challenge for wave propagation in waveguides and plasma diagnostics, the writer is going directly to clarify intimately the plasma creation by means of microwaves in a compact geometry and slim tubes. He then completely discusses wave interplay with bounded plasmas and offers a deeper figuring out of the physics. The publication concludes with an updated account of contemporary learn on pulsed microwaves and the applying of compact microwave plasmas for multi-element FIB.

It offers a consolidated and unified description of the rising parts in plasma technological know-how and expertise using wave-based plasma assets in response to the author’s personal paintings and adventure. The e-book should be precious not just to proven researchers during this quarter yet also will function a very good advent to these attracted to employing those principles to varied present and new applications.

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2. M. Tanaka, R. Nishimoto, S. Higashi, N. Harada, T. Ohi, A.  Kawai. 1991. Overdense plasma production using electron cyclotron waves, J. Phys. Soc. Jpn. 60: 1600–1607. 3. M. Sugimoto, M. Tanaka, and Y. Kawai. 1996. Electron cyclotron wave plasma production using a concave lens, Jpn. J. Appl. Phys. 35: 2803–2807. 4. Y. T. A. D. D. C. Lok. 1991. Electrons cyclotron resonance plasma chemical vapor deposition of large area uniform silicon nitride films, J. Vac. Sci. Technol. 9: 3071–3077. 5. J. Forster and W.

27. H. Amemiya, S. Ishii, and Y. Shigueoka. 1991. Multicusp type electron cyclotron resonance ion source for plasma processing, Jpn. J. Appl. Phys. 30: 376–384. 28. D. Mantei and S. Dhole. 1991. Characterization of permanent magnet electron cyclotron resonance plasma source, J. Vac. Sci. Technol. B 9: 26–28. Q. M. Lyneis. 1994. Plasma potentials and performance of the advanced electron cyclotron resonance ion source, Rev. Sci. Instrum. 65: 2947–2952. 30. D. N. Smith. 1994. Design studies for an advance ECR ion source, Rev.

Maeda and H. Amemiya. 1994. Electron cyclotron resonance plasma in multicusp magnets with a checkered pattern, Jpn. J. Appl. Phys. 33: 5032–5037. 21. M. Maeda and H. Amemiya. 1994. Electron cyclotron resonance plasma in multicusp magnets with axial magnetic plugging, Rev. Sci. Instrum. 65: 3751–3755. 22. S. Satoru and N. Sato. 1991. Plasma structures in an electron cyclotron resonance plasma processing device, J. Appl. Phys. 70: 4165–4171. 23. J. Asmussen. 1989. Electron cyclotron resonance microwave discharges for etching and thin-film deposition, J.

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